diff --git a/llvm/tools/llvm-profgen/PerfReader.cpp b/llvm/tools/llvm-profgen/PerfReader.cpp
index 878147642aa6e..e9442027aed3f 100644
--- a/llvm/tools/llvm-profgen/PerfReader.cpp
+++ b/llvm/tools/llvm-profgen/PerfReader.cpp
@@ -11,6 +11,7 @@
 #include "llvm/DebugInfo/Symbolize/SymbolizableModule.h"
 #include "llvm/Support/FileSystem.h"
 #include "llvm/Support/Process.h"
+#include "llvm/Support/ToolOutputFile.h"
 
 #define DEBUG_TYPE "perf-reader"
 
@@ -375,6 +376,9 @@ PerfScriptReader::convertPerfDataToTrace(ProfiledBinary *Binary,
                                           StringRef(ErrorFile)};    // Stderr
   sys::ExecuteAndWait(PerfPath, ScriptMMapArgs, std::nullopt, Redirects);
 
+  PerfScriptReader::TempFileCleanups.emplace_back(PerfTraceFile);
+  PerfScriptReader::TempFileCleanups.emplace_back(ErrorFile);
+
   // Collect the PIDs
   TraceStream TraceIt(PerfTraceFile);
   std::string PIDs;
@@ -1220,5 +1224,7 @@ void PerfScriptReader::parsePerfTraces() {
     writeUnsymbolizedProfile(OutputFilename);
 }
 
+SmallVector<CleanupInstaller, 2> PerfScriptReader::TempFileCleanups;
+
 } // end namespace sampleprof
 } // end namespace llvm
diff --git a/llvm/tools/llvm-profgen/PerfReader.h b/llvm/tools/llvm-profgen/PerfReader.h
index e9f619350bf97..b821cbe13efae 100644
--- a/llvm/tools/llvm-profgen/PerfReader.h
+++ b/llvm/tools/llvm-profgen/PerfReader.h
@@ -21,6 +21,9 @@ using namespace llvm;
 using namespace sampleprof;
 
 namespace llvm {
+
+class CleanupInstaller;
+
 namespace sampleprof {
 
 // Stream based trace line iterator
@@ -604,6 +607,11 @@ class PerfScriptReader : public PerfReaderBase {
   // Extract perf script type by peaking at the input
   static PerfContent checkPerfScriptType(StringRef FileName);
 
+  // Cleanup installers for temporary files created by perf script command.
+  // Those files will be automatically removed when running destructor or
+  // receiving signals.
+  static SmallVector<CleanupInstaller, 2> TempFileCleanups;
+
 protected:
   // The parsed MMap event
   struct MMapEvent {