This repository contains the specification for the Oxford Instruments NanoAnalysis HDF5 file format (.h5oina). The H5OINA file format is based on Hierarchical Data Format 5 (HDF5) and has been designed to exchange microanalysis data within the Oxford Instruments’ AZtec ecosystem as well as with third-party software and libraries.
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Oxford Instruments NanoAnalysis HDF5 File Specification
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