/
Computease120nmSiO.txt
189 lines (189 loc) · 6.05 KB
/
Computease120nmSiO.txt
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
39
40
41
42
43
44
45
46
47
48
49
50
51
52
53
54
55
56
57
58
59
60
61
62
63
64
65
66
67
68
69
70
71
72
73
74
75
76
77
78
79
80
81
82
83
84
85
86
87
88
89
90
91
92
93
94
95
96
97
98
99
100
101
102
103
104
105
106
107
108
109
110
111
112
113
114
115
116
117
118
119
120
121
122
123
124
125
126
127
128
129
130
131
132
133
134
135
136
137
138
139
140
141
142
143
144
145
146
147
148
149
150
151
152
153
154
155
156
157
158
159
160
161
162
163
164
165
166
167
168
169
170
171
172
173
174
175
176
177
178
179
180
181
182
183
184
185
186
187
188
189
#Spectroscopic Ellipsometric (SE) Data Wavelength (nm) Psi Delta
381.244690 35.117119 263.001709
382.417023 35.191795 263.578613
383.596619 35.143261 264.211548
384.783447 35.194538 264.769104
385.977661 35.366013 265.348267
387.179291 35.438576 265.978851
388.388458 35.459194 266.326721
389.605194 35.633690 266.821655
390.829590 35.679184 267.337036
392.061676 35.709980 267.660889
393.301575 35.815453 268.136993
394.549316 35.986435 268.437653
395.805054 36.074413 268.855530
397.068787 36.264160 269.189240
398.340576 36.362610 269.467499
399.620544 36.502151 269.826141
400.908813 36.631462 269.934174
402.205383 36.792831 -89.632675
403.510376 36.902077 -89.362183
404.823883 37.054024 -89.039238
406.145935 37.204220 -88.873482
407.476624 37.411976 -88.633385
408.816101 37.557674 -88.328842
410.164459 37.780544 -88.191788
411.521667 37.964455 -87.986237
412.887939 38.145618 -87.817604
414.263275 38.375130 -87.479019
415.647797 38.564552 -87.369545
417.041656 38.762218 -87.256149
418.444885 38.952599 -87.081146
419.857513 39.154434 -86.886795
421.279785 39.398052 -86.764839
422.711731 39.651089 -86.653786
424.153412 39.873524 -86.491364
425.604980 40.112484 -86.440147
427.066498 40.414196 -86.473442
428.538086 40.663216 -86.337646
430.019836 40.914177 -86.277451
431.511902 41.172886 -86.221733
433.014343 41.503441 -86.153938
434.527283 41.764481 -86.089447
436.050873 42.090160 -86.138176
437.585144 42.401241 -86.086029
439.130219 42.716076 -86.121712
440.686340 43.014702 -86.104622
442.253479 43.380230 -86.128128
443.831787 43.728836 -86.228149
445.421387 44.063286 -86.255814
447.022400 44.435127 -86.218925
448.635071 44.790253 -86.332764
450.259338 45.184322 -86.461006
451.895416 45.568462 -86.478035
453.543396 46.015903 -86.628311
455.203461 46.444450 -86.704231
456.875793 46.899384 -86.924049
458.560394 47.293610 -86.989540
460.257477 47.743847 -87.160042
461.967133 48.236359 -87.314972
463.689545 48.702213 -87.447891
465.424957 49.256401 -87.487976
467.173279 49.740200 -87.749054
468.934814 50.264946 -87.960419
470.709717 50.792362 -88.209824
472.498047 51.392231 -88.435425
474.300110 51.976563 -88.651047
476.115906 52.484180 -88.929871
477.945648 53.112835 -89.185303
479.789551 53.732758 -89.434807
481.647705 54.328159 -89.691048
483.520355 54.953724 269.992188
485.407562 55.633411 269.706757
487.309631 56.316040 269.399536
489.226563 57.027637 269.071411
491.158691 57.742157 268.811066
493.106140 58.499466 268.370514
495.069153 59.319447 268.035309
497.047760 60.078205 267.648682
499.042297 60.932899 267.295898
501.052887 61.768242 266.865662
503.079742 62.618263 266.347229
505.123108 63.484425 265.928040
507.183105 64.397995 265.358429
509.259949 65.312561 264.854492
511.353912 66.181129 264.317261
513.465149 67.164078 263.725647
515.593872 68.142792 263.053436
517.740356 69.173782 262.471466
519.904785 70.170876 261.744720
522.087341 71.167847 261.016052
524.288330 72.219528 260.171112
526.507996 73.291183 259.433594
528.746460 74.321396 258.265656
531.004089 75.405159 257.224396
533.281067 76.480209 256.031647
535.577637 77.559280 254.668091
537.894165 78.637672 252.832062
540.230652 79.774429 250.968903
542.587646 80.872322 248.496094
544.965210 81.957329 245.528839
547.363831 83.063820 241.632111
549.783569 84.118179 236.310394
552.224854 85.119911 228.911438
554.687866 86.009102 218.457504
557.172974 86.691093 202.228699
559.680359 87.045677 181.007278
562.210510 86.930626 158.365845
564.763672 86.396210 138.853531
567.340088 85.571770 126.112167
569.940063 84.661140 116.651787
572.564026 83.589462 111.239120
575.212280 82.551239 106.555321
577.885132 81.482628 102.943108
580.582947 80.371078 100.272354
583.306030 79.300209 98.252861
586.054810 78.181900 96.606834
588.829590 77.067955 95.136864
591.630859 76.013840 93.625526
594.458862 74.931046 92.544823
597.313965 73.856941 91.654060
600.196655 72.831940 90.544052
603.107300 71.807701 89.733078
606.046387 70.746216 89.140251
609.014221 69.757790 88.383469
612.011230 68.796608 87.765594
615.037903 67.856514 87.032494
618.094604 66.846802 86.438110
621.182007 65.925652 85.879150
624.300232 65.022964 85.439751
627.450012 64.135017 85.087860
630.631714 63.292290 84.617859
633.845825 62.419003 84.364746
637.092896 61.568890 83.775047
640.373413 60.767765 83.446625
643.687866 59.942192 82.902718
647.036804 59.129665 82.750648
650.420837 58.448151 82.482765
653.840393 57.633404 81.982323
657.296021 56.939514 81.727043
660.788513 56.198803 81.362061
664.318237 55.467613 81.040718
667.885864 54.856144 81.001656
671.492065 54.132534 80.707970
675.137390 53.465813 80.397583
678.822571 52.848858 80.154594
682.548157 52.234623 79.986588
686.314819 51.651711 79.745239
690.123352 51.031105 79.510361
693.974365 50.457176 79.256691
697.868591 49.817459 79.082161
701.806763 49.285141 79.047104
705.789673 48.797539 78.745476
709.817993 48.208374 78.543015
713.892578 47.678841 78.472702
718.014221 47.240307 78.308594
722.183716 46.749073 78.248062
726.401978 46.194576 78.100952
730.669800 45.807358 77.957253
734.987976 45.330563 77.746765
739.357544 44.814957 77.698097
743.779419 44.407341 77.645683
748.254456 43.950089 77.613678
752.783691 43.568470 77.415314
757.368042 43.119003 77.343079
762.008606 42.776295 77.242867
766.706421 42.355621 77.287720
771.462524 42.014870 77.064316
776.277954 41.592659 77.000778
781.153870 41.307663 77.101524
786.091431 40.868694 76.907501
791.091858 40.489147 76.994385
796.156250 40.218521 76.824158
801.285950 39.849789 76.960854
806.482178 39.480873 76.940430
811.746216 39.148842 76.871521
817.079468 38.794064 76.885292
822.483215 38.461212 76.752251
827.958862 38.118980 77.037262
833.507996 37.886402 76.965912
839.131958 37.470402 76.899597
844.832397 37.169579 76.988632
850.610718 36.916618 76.778900
856.468628 36.650127 77.065300
862.407898 36.272007 77.095062
868.430054 35.928516 77.042885
874.536926 35.714554 77.068016
880.730286 35.419342 77.323334
887.011902 35.068855 77.446846
893.383972 34.835896 77.577110