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SKY130A.tek
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SKY130A.tek
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; ASITIC STACK UP Definition File
; SKY130A OpenPDK
<chip>
chipx = 512 ; Arbitrary
chipy = 512
fftx = 256 ； Xfft size
ffty = 256
TechFile = SKY130A.tek
TechPath = .
freq = 24
eddy = 0 ; Eddy Current Calculation is disabled
<layer> 0 ; P- Bulk
rho = 1e-3 ; Unknown, using generic value for P- Si Bulk / ohms-cm
t = 700 ; Unknown, using arbitrary value / um
eps = 11.9 ; Unknown, using generic value for P- Si /
<layer> 1 ; Silicon Oxide
rho = 1e10 ; Using generic values
t = 11.8
eps = 4.2 ; Due to stress, the lower & thinner layers have smaller epsilon
; Note: The process has 5 Metal Layers & 1 lead (?) local interconnect layer
; The lead layer is ignored due to its poor performance. It should be left blank or shorted to M1&2. For the actual implementation, the 3 bottom layers are always grounded to provide shielding.
; Lead
<metal> 0
layer = 1 ; Inside Oxide
rsh = 12800 ; Sheet Resistance, Unit is mOhms / Square
; PS this is horrible
t = 0.1 ; Thickness / um
d = 0.9361 ; Distance from bottom of the layer (1)
name = li
color = LightSkyBlue1
<metal> 1
layer = 1 ; Inside Oxide
rsh = 125
t = 0.36 ; Thickness / um
d = 1.3761 ; Distance from bottom of the layer (1)
name = M1
color = Plum
<metal> 2
layer = 1 ; Inside Oxide
rsh = 125
t = 0.36 ; Thickness / um
d = 2.7861 ; Distance from bottom of the layer (1)
name = M2
color = PaleVioletRed
<metal> 3
layer = 1 ; Inside Oxide
rsh = 47
t = 0.845 ; Thickness / um
d = 2.7861 ; Distance from bottom of the layer (1)
name = M3
color = Silver
<metal> 4
layer = 1 ; Inside Oxide
rsh = 47
t = 0.845 ; Thickness / um
d = 4.0211 ; Distance from bottom of the layer (1)
name = M4
color = Cyan
; This is unfortunately complicated: The top surface is covered by Thin Oxide + Nitride instead of Thick SiO2, maybe I should avoid using this layer entirely
<metal> 5
layer = 1 ; Inside Oxide
rsh = 29
t = 1.26 ; Thickness / um
d = 5.3711 ; Distance from bottom of the layer (1)
name = M5
color = Purple
; VIA Definitaions
; r is obtained from the document "SKY130 (SkyWater PDK) -- Stackup Capacitance Data [public]"
<via> 0 ; mcon, aka viali
top = 1
bottom = 0
r = 9.3 ; Resistance per Via
width = 0.17
space = 0.19
overplot1 = 0.3 ; Minimum distance to bottom ?
overplot2 = 0.3 ; Minimum distance to top ?
name = viali
color = MediumBlue
<via> 1 ; via, aka viam1
top = 2
bottom = 1
r = 4.5 ; Resistance per Via
width = 0.26
space = 0.06 ; ?
overplot1 = 0 ; Minimum distance to bottom ?
overplot2 = 0 ; Minimum distance to top ?
name = viam1
color = Magenta
<via> 2 ; via2, aka viam2
top = 3
bottom = 2
r = 3.41 ; Resistance per Via
width = 0.28
space = 0.12
overplot1 = 0.025 ; Minimum distance to bottom ??
overplot2 = 0.025 ; Minimum distance to top ??
name = viam2
color = Coral
<via> 3 ; via3, aka viam3
top = 4
bottom = 3
r = 3.41 ; Resistance per Via
width = 0.32
space = 0.08
overplot1 = 0.03 ; Minimum distance to bottom ???
overplot2 = 0.005 ; Minimum distance to top ???
name = viam3
color = Crismon
<via> 4 ; via4, aka viam4
top = 5
bottom = 4
r = 0.38 ; Resistance per Via
width = 1.18
space = 0.42
overplot1 = 0.12 ; Minimum distance to bottom
overplot2 = 0.12 ; Minimum distance to top
name = viam4
color = CadetBlue
; The "overplot" values are quite random, what the hell
; The top contact (rdlcon) is ignored