piezoelectric_simulation

Multiphysics FEM-simulation

• with ANSYS(R) FEM-program for UNIX and PC workstations
• MEMS-sensors based on silicon with piezoelectric thin-film layers
• and etched quartz crystals (DETF).

FEM - Finite Element Method

Silicon

• piezoelectric simulation of MEMS sensors & actuators
• silicon resonators & actuators (beams, diaphragms, cantilever, etc.)
• with thin-film layers for excitation & detection
• additional layers: ZnO & AlN piezoelectric thin-films
• hybrid bimorph Si structures with PZT ceramics
• triple-beam force sensors

Quartz

• HF-etched quartz crystals
• different quartz cuts
• Double-Ended-Tuning-Fork (DETF)

Further information

• https://tfconsult.com/piezoelectrical-driven-force-sensor/
• https://tfconsult.com/entwurf-und-auslegung-mikromechanischer-strukturen/
• https://tfconsult.com/microsystems-modeling/
• https://tfconsult.com/berechnung-von-quarz-kraftsensoren/
• https://tfconsult.com/piezoelectric-micro-actuators/
• https://tfconsult.com/tag/piezo/
• https://tfconsult.com/tag/quarz/
• https://tfconsult.com/tag/zno/