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System Level Model of micromirror cell in VHDL-AMS generated by ANSYS ROM Tool

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Kolchuzhin/micromirror_cell_in_VHDL-AMS

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System Level Model of micromirror cell in VHDL-AMS generated by ANSYS ROM Tool

micromirror

The goal of this project is to popularize of Mode Superposition based Reduced Order Modeling technique for MEMS simulations.

Tutorial:

Kolchuzhin, Vladimir and Mehner, Jan (2015, June 30). System level modeling of the micromirror cell. Zenodo. 10.5281/zenodo.19153

DOI

Geometric model:

Simplorer model:

Cloud-based system simulator PartQuest Explore:

https://explore.partquest.com/live-embed-design/324074 work in progress

Simulink Model:

Simulink model of the micromirror cell:

  • micromirror_ini.m
  • sene.m
  • cap12.m
  • cap13.m
  • cap23.m
  • micromirror.mdl (in progress)

https://github.com/Kolchuzhin/micromirror_cell_in_VHDL-AMS/blob/master/Simulink_model/readme.md

hAMSter model:

The vhd-files have been compiled with hAMSter simulation system Version 2.0:

  • variant 1: "Original Model" with comments + testbench.vhd;
  • variant 2: micromirror.vhd (single file w/o packages);
  • variant 3: micromirror.vhd (w/o SIGNAL) in progress;

Testbench:

  • Solver parameters: Euler solver, time=1.5m, step=0.5 us
  • Load options:
    • use_pass=0 => external modal forces, uN; fm1_ext=km_1*q1_ext, => q1_ext=1.0 (mechanical test)
    • use_pass=1 => calculation of voltage displacement functions up to pull-in: voltage sweep
    • use_pass=2 => calculation of voltage displacement functions at multiple load steps
    • use_pass=3 => calculation of displacements at acting element loads
    • use_pass=4 => (prestressed) harmonic analysis -> chirp for harmonic response; + DFT (external)
    • use_pass=5 => nonlinear transient analysis

Original Model:

Original Model of micromirror cell generated by ANSYS ROM Tool:

  • initial.vhd
  • ca12_ams_130.vhd
  • ca13_ams_130.vhd
  • ca23_ams_130.vhd
  • s_ams_130.vhd
  • transducer.vhd

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System Level Model of micromirror cell in VHDL-AMS generated by ANSYS ROM Tool

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