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Extract thickness #93
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Hi, If you know your materials you can even use the thickness of your layer as only varying parameter. I hope i could help you a bit, otherwise you might have to show us the code you are using, so it's easier to help. |
So if i understand
in the basic example, we set the value of 20nm as a starting point here (SiO2_d) and once fitted, this is the result with the fitted value ?
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Yes these are the fitted values. As you can see, the thickness changed to 2 nm with an error of 0.35%. Edit: This is of cause only the error of the fit and does not take measurement uncertainties into account. |
Hi
I am not familiar with using ellipsometry models on delta psi data.
looking at the docs, i understand how the library can be used to fit a model to extract n, k or eps1/2 from delta psi, but where is the estimation of the thickness (and its error) of the sample stored?
thanks
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