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OIPT-RecipeViewerPublic

The main purpose of this Github repository is to keep track of bug and feature reports related to the OIPT-RecipeViewer from Phy-dev. For more details see: http://phy-dev.nl/oipt-recipeviewer

Key features of the OIPT-RecipeViewer: The OIPT-RecipeViewer was written to enable the following workflows:

Quickly get an overview of an entire recipe before starting e.g. a deposition run. Visualize the variation of process parameters as a function of process steps. Error detection in recipes, highlighting steps that fail to comply. Reliable time-to-completion calculation. The following features are especially useful for sharing and documenting of recipes:

Save recipes as “oipt” files facilitating easy sharing of recipe-intent between users. Export recipes to Excel format for use in e.g. a presentation or document. Highlight / find differences between recipes useful for e.g. standardization on a known-good recipe. You can zip the entire Recdata folder on a Oxford Tool, move this zip file to e.g. an USB stick and open it from the comfort of your desk.

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Viewer for OIPT recipes visualizing ALD / CVD processes

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