Releases: ulfgri/nk
Releases · ulfgri/nk
Midsummer Edition
- added data for the ma-N1400 negative i-line and e-beam resist from
Micro Resist Technology, GmbH
- new VASE measurement for AZ BARLi II BARC in collection 'litho'
- new VASE measurements for bleached and unexposed Dow/Shipley S1800 photoresist
in collection 'litho'.
- add new measured refractive index file litho/WiDE-C_180.nk
The index from the data sheet does not seem to be quite correct.
- new data for LOR-A in collection 'litho' with wider wavelength range.
Christmas edition
- corrects data for Ultra-i123 i-line photoresist
- additional data sets for lithography materials
More data for lithography
- added more materials to the litho collection