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Design, simulation, and fabrication of microfludic chip and channel

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Design of Integrated Microrobotic Fish

Field: Design, simulation, and fabrication of microfludic chip and channel

Course: VE490, Undergraduate Research

Term: Spring 2021

Instructor: Prof. Xuyang Lu

Students: Kexin Li, Yihua Liu

Laboratory: Laboratory of Ultrafast Integrated Systems (LUIS) at the University of Michigan – Shanghai Jiao Tong University Joint Institute

Techniques:

  • Physics: electromagnetics and fluid mechanics (coupling)
  • Numerical analysis: MATLAB and Mathematica
  • Layout design: KLayout
  • Simulation: COMSOL Multiphysics (spf+ec+tds and FSI)
  • Experiment: photolithography, deposition, PDMS bonding, and wire bond

Result:

Result

See the final report for details.

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