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acquisition_program/\@url: https://www.jawoollam.com/ellipsometry-software/wvase | ||
acquisition_program/program: WVASE | ||
acquisition_program/version: '3.882' | ||
address: Zum Großen Windkanal 2, 12489 Berlin, Germany | ||
affiliation: Humboldt-Universität zu Berlin | ||
angle_of_incidence_unit: degrees | ||
angular_spread: | ||
unit: rad ** 2 | ||
value: 0.2 | ||
atom_types: Si, O | ||
blocks: | ||
- type | ||
- angle_of_incidence | ||
calibration_status: no calibration | ||
Data: | ||
data_identifier: 1 | ||
data_software: WVASE | ||
data_software/@url: https://www.jawoollam.com/ellipsometry-software/wvase | ||
data_software/version: '3.882' | ||
data_type: Psi/Delta | ||
spectrum_type: wavelength | ||
spectrum_unit: Angstroms | ||
Instrument: | ||
Beam_path: | ||
Detector: | ||
count_time: | ||
unit: s | ||
value: 1.0 | ||
detector_type: CCD spectrometer | ||
focussing_probes: | ||
angular_spread: | ||
unit: rad | ||
value: 0.2 | ||
data_correction: false | ||
light_source: | ||
source_type: arc lamp | ||
rotating_element: | ||
revolutions: 50.0 | ||
Sample_stage: | ||
environment_conditions: | ||
medium: air | ||
stage_type: manual stage | ||
angle_of_incidence/@unit: degrees | ||
calibration_status: no calibration | ||
company: J. A. Woollam Co. | ||
ellipsometer_type: dual compensator | ||
model: RC2 | ||
model/@version: 0.0.1 | ||
rotating_element_type: compensator (source side) | ||
software: CompleteEASE | ||
software/@url: https://www.jawoollam.com/ellipsometry-software/completeease | ||
software/version: '6.37' | ||
Sample: | ||
atom_types: Si, O | ||
backside_roughness: false | ||
chemical_formula: SiO2 | ||
layer_structure: 2nm SiO2 on Si | ||
sample_history: Commercially purchased sample | ||
sample_name: 2nm SiO2 on Si | ||
sample_type: multi layer | ||
substrate: Si | ||
User: | ||
address: Zum Großen Windkanal 2, 12489 Berlin, Germany | ||
affiliation: Humboldt-Universität zu Berlin | ||
email: surname.name@physik.hu-berlin.de | ||
name: Name Surname | ||
colnames: | ||
- type | ||
- wavelength | ||
- angle_of_incidence | ||
- psi | ||
- delta | ||
- err.psi | ||
- err.delta | ||
column_names: | ||
- psi | ||
- delta | ||
company: J. A. Woollam Co. | ||
count_time: | ||
unit: s | ||
value: 1 | ||
data_identifier: 1 | ||
data_type: psi/delta | ||
- Psi | ||
- Delta | ||
- err.Psi | ||
- err.Delta | ||
definition: NXellipsometry | ||
definition/\@url: https://github.com/FAIRmat-Experimental/nexus_definitions/tree/fairmat-ellips/contributed_definitions/NXellipsometry.nxdl.xml | ||
definition/\@version: 0.0.2 | ||
detector_type: CCD spectrometer | ||
ellipsometry_type: dual compensator | ||
email: surname.name@physik.hu-berlin.de | ||
err-var: | ||
- err.psi | ||
- err.delta | ||
definition/@url: https://github.com/FAIRmat-NFDI/nexus_definitions/blob/fairmat/contributed_definitions/NXellipsometry.nxdl.xml | ||
definition/@version: 0.0.2 | ||
derived_parameter_type: depolarization | ||
experiment_description: RC2 scan on 2nm SiO2 on Si in air | ||
experiment_identifier: exp-ID | ||
experiment_type: NIR-Vis-UV spectroscopic ellipsometry | ||
filename: test-data.dat | ||
firmware: CompleteEASE | ||
firmware/\@url: https://www.jawoollam.com/ellipsometry-software/completeease | ||
firmware/\@version: '6.37' | ||
focussing_probes: false | ||
integration_time: | ||
unit: s | ||
value: 0 | ||
layer_structure: 2nm SiO2 on Si | ||
light_source: arc lamp | ||
medium: air | ||
model: RC2 | ||
model/\@version: 0.0.1 | ||
name: Name Surname | ||
parameters: | ||
- type | ||
- angle | ||
rotating_element: compensator (source side) | ||
sample_history: Commercially purchased sample | ||
sample_name: 2nm SiO2 on Si | ||
plot_name: Psi and Delta | ||
sep: \t | ||
skip: 3 | ||
stage_type: manual stage | ||
start_time: '2022-01-27T04:35:00+00:00' | ||
wavelength_unit: angstrom | ||
x-var: wavelength | ||
y-var: | ||
- psi | ||
- delta | ||
start_time: '2022-01-27T03:35:00+00:00' |
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