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Python utilities for loading, plotting, and editing wafer defect maps known as KLA Reference Files (KLARFs)

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MichaelHotaling/klarfkit

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drawing

Dealing with particles is hard. klarfkit makes it easier.

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Introduction

klarfkit can be used to analyze semiconductor wafer maps to locate issues with production or failing parts:

Simply load a klarf file, typically with the extension .001 into the WaferMap and generate plots from that klarf

Applications

  • Generate a plot to locate defects caused by process variation
  • Overlay several KLARF defect files into one wafer map to find hidden process issues
  • Color defects on the defect map by time, process, defect class, size, inspector, or any number of KLARF attributes
  • Edit KLARF files by exporting the raw data to CSV or Excel formats and importing the data back into KLARF format
  • Combine several KLARF files together

Installation

pip install git+https://github.com/MichaelHotaling/klarfkit.git

Contributing

If you have different file versions, please consider adding them to the sample_files folder via Pull Request.

Any additional files are very welcome and help to ensure the library works for all KLARF versions.

Documentation and tutorials

Official documentation

Questions? Comments? Requests?

Please create an issue in the klarfkit repository.