Update dependency BenchmarkDotNet to v0.13.3

[renovate]

This PR contains the following updates:

Package	Type	Update	Change
BenchmarkDotNet	nuget	patch	0.13.2 -> 0.13.3

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Configuration

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[codecov]

Codecov Report

Merging #918 (a142e14) into master (84b112a) will decrease coverage by 0.03%.
The diff coverage is n/a.

@@            Coverage Diff             @@
##           master     #918      +/-   ##
==========================================
- Coverage   72.32%   72.28%   -0.04%     
==========================================
  Files         255      255              
  Lines       12847    12847              
  Branches      817      817              
==========================================
- Hits         9292     9287       -5     
- Misses       3555     3560       +5     

Impacted Files	Coverage Δ
src/Client/LspClientOutputFilter.cs	64.70% <0.00%> (-23.53%)	⬇️
src/Shared/LspRequestRouter.cs	98.00% <0.00%> (-2.00%)	⬇️

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