Version 1.0
The four class definitions in this toolbox provide a simple, versatile, and scriptable means of generating patterns for Raith electron-beam lithography (EBL) and focused ion beam (FIB) tools using MATLAB.
This toolbox was developed at the National Institute for Nanotechnology (NINT), a joint initiative between the Government of Canada, the Government of Alberta, the National Research Council Canada (NRC), and the University of Alberta.
- Generate Raith-dialect GDSII hierarchy (.csf) and positionlist (.pls) files directly within MATLAB
- Plot patterns in MATLAB using Raith dose factor colouration, from individual GDSII elements to entire positionlists
- Full support for Raith curved elements (circles, ellipses, arcs)
- Simply-connected font defined to use for text elements
This toolbox has been tested with MATLAB R2010a and later; use with earlier versions of MATLAB is at your own risk.
To install, simply place Raith_element.m, Raith_structure.m, Raith_library.m, Raith_positionlist.m in a folder on your MATLAB path.
Please refer to Raith_GDSII MATLAB Toolbox - User Guide.pdf for a quick-start guide, tutorial examples, and a full description of the class definitions.
This toolbox is subject to the terms of the Mozilla Public License, v. 2.0.