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MIMCAP bottom plate spacing(MIMTM.1) and MSLOT9d DRC issues #442

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sardaratif71 opened this issue May 10, 2024 · 0 comments
Open

MIMCAP bottom plate spacing(MIMTM.1) and MSLOT9d DRC issues #442

sardaratif71 opened this issue May 10, 2024 · 0 comments

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@sardaratif71
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sardaratif71 commented May 10, 2024

Mimcap bottom metal should have distance of 1.2um to other bottom plate of Mimcap (M4) metal or routing according to MIMTM.1 rule. It is currently 0.6um.

Mslot.9d drc is due to magic cap generator generate some extra metal5(TM ) over mimcap which lead to mslot.9d issue.
Actually if i can explain better mimcap and mimcap contact are of same size so cap generator has to have 0.39um extra TM(metal5) around mimcap to avoid MIMTM.4 ( vian-1 surround of 0.39). This issue can be avoided by either making contact smaller to mimcap because at the end this large say 20 by 20 contact will be broken into small vias of 0.26um multiple vias.
so two things can be done one is to make mimcap contact smaller. Other is to not surround any metal around vian-1 because during gds generation when this via will be broken into multiple automatically it will get surrounded by m5 but only by 0.2. So we need to ensure that end surround should be make such that at corners we get 0.39 around via as well as TM should be equal to mimcap.

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