aldFoam is a package to solve the reactive transport under self-limited processes such as Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE). aldFoam comprises a number of solvers and boundary conditions. aldFoam is built on top of OpenFOAM, a C++ toolbox to solve partial differential equations using finite volume methods.
In order to install aldFoam you need to have OpenFOAM installed in your system. From github:
git clone https://github.com/aldsim/aldFoam.git
cd aldFoam
cd firstorder
wmake
cd ..
cd dose
wmake
cd ..
cd aldFoam
wmakeThis gives you a basic installer to simulate the reactive transport of a single ALD or ALE precursor.
A description of aldFoam can be found in the manuscript:
A. Yanguas-Gil, J. A. Libera, and J. W. Elam, Reactor scale simulations of ALD and ALE: ideal and non-ideal self-limited processes in a cylindrical and a 300 mm wafer cross-flow reactor, arXiv:2106.07132
The manuscript is currently under review.
aldFoam was developed at Argonne National Laboratory. The following scientist have been involved in the project:
- Angel Yanguas-Gil, ayg@anl.gov, Lead and founder.
- Jeffrey W Elam
aldFoam currently contains the core solver presented in the manuscript. Other effects, including the presence of competing byproducts and soft-saturating processes will be added as separate solvers in the near future.
Copyright (2019) UChicago Argonne, LLC
aldFoam is distributed under the terms of the GPLv3 license. A copy of the license is included in this distribution.