A library plus a collection of Jupyter notebooks for the development of optical metrology techniques focused on scatterometry and hybrid metro.
- easy geometrical modeling with user expandable instructions set
- direct problem solving using 1D MMFE (RCWA-like) electromagnetic code
- inverse problem : classical, library method, ...
- includes Fresnel code for fast optical indices determination
- designed to be used within Jupyter notebook (examples included)
Get Jupyter working on your computer. Download the tree. Play with the example notebooks.
- S. SOULAN - Initial software work
- D. FUARD, J.-H. TORTAI - MMFE part
- All the past & present LTM metrology contributors
This project is licensed under the CeCILL License - see the Licence_CeCILL_V2.1-en.txt file for details
- LTM, Laboratoire des Technologies de la microélectronique. ltmlab.fr
- Université Grenoble Alpes
- Centre National de la Recherche Scientifique
- This work was partly supported by the french RENATECH network