ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
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Updated
Jun 12, 2024 - Roff
ANSYS(TM) FEM: multiphysics simulation of MEMS-sensors based on silicon with pizoelectric thin-film layers and etched quartz crystals
Course program developed by UETP-MEMS (University Enterprise Training Partnership for Micro Electro Mechanical Systems) with the support of the European Programme COMETT (Community Programme for Education and Training in Technology). (C)opyright 1994, UETP-MEMS, FSRM, Switzerland
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