BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator
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Updated
Apr 17, 2024 - GLSL
BIMORPH : MEMS microactuator based on silicon diaphragm with piezoceramic, Material properties via BIMORPH.MAT, piezo-electric BIMORPH microactuator
ANSYS analyses of triple-beam silicon sensors, Silizium-Dreifachstimmgabel, Si(100)
Silizium-Einfachbalken, GMS-Kraftsensor, Balkenresonator
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