ViennaPS-4.6.0

New: Thermal Oxidation Model

• New Oxidation<T, D> process model implementing Deal-Grove thermal silicon oxidation
• Supports dry (O₂) and wet (H₂O) oxidants, Si⟨100⟩/⟨110⟩/⟨111⟩/PolySi orientations, variable pressure
• LOCOS (Local Oxidation of Silicon) mode with mask bending and traction coupling
• Elastic contact mechanics for mask deformation
• GPU-accelerated diffusion (BiCGSTAB) and CFL-based adaptive time stepping
• Warm start from existing level-set data
• New examples: finOxidation, trenchOxidation, stepOxidation, locosOxidation
• New oxidation test suite

Python Bindings

• Full Python bindings for Oxidation: temperature, time, oxidant, orientation, pressure, solver tolerances, SIMPLE relaxation factors, mechanics iterations, GPU mode and preconditioner

GPU Benchmarks

• Added CPU_Scaling benchmark for multi-core CPU scaling measurements

Dependency Update

• Requires ViennaLS ≥ 5.8.2

CI / Packaging

• macOS ARM64 wheel now built on macos-15 (avoids macOS 26 runner libomp incompatibility)
• GPU BiCGSTAB support enabled in the Ubuntu wheel