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ViennaPS-4.7.0

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@FilipovicLado FilipovicLado released this 29 Oct 09:41
v4.7.0
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What's Changed

  • Add ion implantation and thermal annealing process models with a public model database by @FilipovicLado in #236
  • feat: add plasma rate reporting and GPU fluorocarbon etching by @tobre1 in #238
  • refactor: simplify Python examples and unify configuration conversion by @tobre1 in #239
  • feat: update benchmarks, adopt ViennaCore NFKDTree, and adapt GPU models to ViennaRay 4.5 by @tobre1 in #240
  • Oxidation: follow the new ViennaLS solver; calibrated stress kinetics, bare-Si start-up, GPU mode by @FilipovicLado in #242

Full Changelog: v4.6.2...v4.7.0

Contributors

FilipovicLado and tobre1
Assets 2
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