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microtech

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ThomasFabula / Modeling-of-Resonant-Silicon-Microsensors

Analytical & numerical modeling of resonant Silicon Microsensors, invited paper Sensors & Materials

analytics simulation sensor transducers fem finite-elements sensors finite-element-analysis silicon mems finite-element-methods resonant resonator microtech resonant-frequency thinfilm zinkoxid

Updated May 23, 2024

ThomasFabula / Mikromechanik

Mikromechanik, MEMS, Mikrosystemtechnik, MST, Halbleiter, Semiconductor, microsystems

electronics mst sensors chips actuator cleanroom silicon mems electronics-engineering micromechanics microtech reinraum mems-sensors microsystems silizium mikromechanik halbleiter mikrosystem

Updated Apr 17, 2024

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