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Jonas M. Ribe edited this page Feb 26, 2014 · 75 revisions

NanoLab Tips#

Photolithography

Positive resists
Negative resists
- SU-8 2um
- SU-8 5um
- SU-8 13um
- SU-8 50um

Lift-off

Image reversal

Soft lithography

Replica molding

Electron beam lithography (EBL)

Positive resist
- PMMA
Negative resist
- SU-8 EBL

Nanoimprint lithography (NIL)