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NTNU NanoLab Process Database

Welcome to the process database for NTNU NanoLab! Here you can find information related to in the cleanroom and protocols written by our own users.

Protocols

Photolithography

• Positive resists
  • SPR700 1um
  • S1813 1p4um
  • S1818 1p9um
• Negative resists
  • SU-8 2um
  • SU-8 5um
  • SU-8 13um
  • SU-8 50um

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Lift-off

• Image reversal

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Soft lithography

• Replica molding

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Electron beam lithography (EBL)

• Positive resist
  • PMMA
• Negative resist
  • SU-8 EBL