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NTNU NanoLab Process Database

Welcome to the process database for NTNU NanoLab! Here you will find protocols written by our own users in addition to information related to the instruments and chemicals in our cleanroom. For instrument booking use LIMS.

Protocols

Photolithography

• Positive resists
  • SPR700 1um
  • S1813 1.4um
  • S1813 1.9um
  • ma-P 1275 28um
• Negative resists
  • SU-8 2um
  • SU-8 5um
  • SU-8 13um
  • SU-8 50um
  • Dilution of SU-8 2000-series

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Lift-off

• AZ5214E Image reversal resist
• PMMA lift-off 50-60nm feature size 110nm pitch

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Soft lithography

• PDMS replica molding
• PDMS plasma bonding

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Electron beam lithography (EBL)

• Spin curves
  • 950K PMMA A4.5 Spin curve for custom resist
• Positive resist
  • PMMA 100nm
  • PMMA 40 nm feature size 200 nm pitch
• Negative resist
  • SU-8 EBL

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Nanoimprint lithography (NIL)

• UV-curable resist
  • AMONIL 180nm
  • Dilution of AMONIL MMS4 to AMONIL MMS10

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Etching

• Dry etch
  • Si cryogenic etch
  • Si cryogenic etch - Sub 60 nm features with PMMA mask
  • Si cryogenic etch - 70 nm holes
  • CAIBE etch of AMONIL
• Wet etch
  • AMONIL resist strip

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Deposition

• Alumina mask
• Gold nano particles
• Sputtering of Si for SiO2 films