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Title: Speeding Up the Topography Imaging of Atomic Force Microscopy by Convolutional Neural Network

Authors: Peng Zheng, Hao He, Yun Gao, Peiwen Tang, Hailong Wang, Juan Peng, Lei Wang, Chanmin Su, Songyuan Ding

E-mail: pengzheng@stu.xmu.edu.cn


Silicon

Data

Parameters Value
Scan Path Raster and μ-path
Scan Size $ 16 \times 16 \ \mu m ^{2} $
Image Resolution $ 256 \times 256 $
Scan Mode Peak Force Tapping
Peak Force Set Point $ 1 \ nN $
Peak Force Frequency $ 2 \ kHz $
Feedback Gain Automatic
Filename Scanning Speed ($ \mu m \cdot s ^{-1} $)
Silicon S010 3.2
Silicon S050 16.0
Silicon S100 32.0
Silicon S150 48.0

Code

silicon.ipynb

VO2 E1

Data

Parameters Value
Scan Path Raster and μ-path
Scan Size $ 1.28 \times 1.28 \ \mu m ^{2} $
Image Resolution $ 256 \times 256 $
Scan Mode Peak Force Tapping
Peak Force Set Point $ 500 \ pN $
Peak Force Frequency $ 2 \ kHz $
Feedback Gain Automatic
Filename Scanning Speed ($ \mu m \cdot s ^{-1} $)
VO2 S050 1.28
VO2 S100 2.56
VO2 S200 5.12
VO2 S300 7.68
VO2 S400 10.24
VO2 S500 12.80

Code

vo2.ipynb

VO2 E2

Data

Parameters Value
Scan Path Raster and μ-path
Scan Size $ 500 \times 500 \ nm ^{2} $
Image Resolution $ 256 \times 256 $
Scan Mode Peak Force Tapping
Peak Force Set Point $ 500 \ pN $
Peak Force Frequency $ 2 \ kHz $
Feedback Gain Automatic
Filename Scanning Speed ($ \mu m \cdot s ^{-1} $)
VO2 P1 S1 1.0
VO2 P1 S8 8.0
VO2 P2 S1 1.0
VO2 P2 S8 8.0

Code

vo2.ipynb

VO2 E3

Data

Parameters Value
Scan Path Raster and μ-path
Scan Size $ 500 \times 500 \ nm ^{2} $
Image Resolution $ 256 \times 256 $
Scan Mode Peak Force Tapping
Peak Force Set Point $ 500 \ pN $
Peak Force Frequency $ 2 \ kHz $
Feedback Gain Automatic
Filename Scanning Speed ($ \mu m \cdot s ^{-1} $) Frame
VO2 Train S1 1.0
VO2 Train S6 6.0
VO2 S1 1 1.0 1
VO2 S1 2 1.0 2
VO2 S1 3 1.0 3
VO2 S1 4 1.0 4
VO2 S1 5 1.0 5
VO2 S6 1 6.0 1
VO2 S6 2 6.0 2
VO2 S6 3 6.0 3
VO2 S6 4 6.0 4
VO2 S6 5 6.0 5

Code

vo2.ipynb

SECM

Data

Parameters Value
Scan Path Raster and μ-path
Scan Size $ 400 \times 400 \ \mu m ^{2} $ and $ 200 \times 200 \ \mu m ^{2} $
Image Resolution $ 200 \times 200 $ and $ 100 \times 100 $
Filename Scanning Speed ($ \mu m \cdot s ^{-1} $)
SECM P1 S050 50
SECM P1 S400 400
SECM P2 S050 50
SECM P2 S400 400

Code

secm.ipynb

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Speeding Up the Topography Imaging of Atomic Force Microscopy by Convolutional Neural Network

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