DTM is a software package that enables automated measurements of semiconductor devices and circuits in a declarative manner across a heterogeneous tool park. You can, for example, execute automated measurements of circuits across different dies and subsites across a whole wafer using a probe station and measurement tools from different manufacturers. For this, device drivers can be implemented for individual tools, and then routines can be implemented that execute measurement routines using these tools. DTM then takes a declarative .json input file that executes these routines reproducibly and stores the corresponding data and metadata for all dies and subsites in a structured hdf5 file. Further, DTM implements several good practices to allow reliable automated measurements, i.e. by throwing errors when needed and preventing undefined behavior.
This public version is not stand-alone, as it is missing device drivers and measurement routines, as these contain copyrighted material that is not licensed, or that is incompatible with FOSS licenses.
DTM is making use of the well-made tm_devices python library by Tektronix for much of its visa and device driver architecture. Many questions related to device drivers and visa communication can be answered by consulting the tm_devices documentation.
This work was supported by the European Research Council (ERC) through the European Union’s Horizon Europe Research and Innovation Programme under Grant Agreement No 101042585. Views and opinions expressed are however those of the authors only and do not necessarily reflect those of the European Union or the European Research Council. Neither the European Union nor the granting authority can be held responsible for them. Further, this research has been financially supported by the CogniGron Research Center and the Ubbo Emmius Fund, University of Groningen, the Netherlands.