Description
Paper here.
From the abstract:
"
The energy spectra and average energies of sputtered atoms were calculated for a number of amorphous targets (Si, Ti, Ni, V and Nb) bombarded with 1 keV Ar ions. The calculations were carried out using the computer simulation programs OKSANA and SRIM-2013.
...
A good agreement of the OKSANA, TRIM.SP and ACAT simulations is noted.
"
Source
Source of data for benchmark; a paper, code, or database with sputtering yields, reflection coefficients, etc.