ViennaPS-4.2.2
ViennaPS – Release Notes
This release provides several bug fixes and minor performance improvements across the ray tracing, time integration, and geometry import components
- Fixed a bug in the 2D ray tracing pipeline where the incoming angle of particles at surface intersections was computed incorrectly. This affected all models with angle-dependent yields. The angular evaluation is now correct, leading to slightly different but physically consistent etch/deposition rates in 2D simulations.
- Updated ViennaLS dependency to include recent stability fixes:
- Corrected adaptive time stepping behavior in the Advect routine.
- Fixed issues in the RK2 and RK3 time integration schemes to ensure consistent temporal evolution and improved robustness for multi-step process flows.
- Improved performance of the GDS reader