4‐ Hardware

The Probe Station is the combination of different electronic and mechanical parts that form the entire Probe Station structure.

Probe Station structure

Here for every part name.

Electronic components

This is the 16x16 sensor, the center must be calibrated with the chuck for the correct operation, with the microscope installed the operator can check it.

Blue area is inner PIXEL.

Green area is outer PIXEL.

Mechanical elements

Bottom plate:

MPI chuck:

N2 blower and nozzle adapter:

Nozzle:

Plastic support blocks:

That piece serves two functions: Providing rigidity to the pin area assembly by connecting it to the upper PCB, reducing the cantilever effect and adjusting the separation between both PCBs to ensure parallelism with the chuck.